ULTRAHIGH-VACUUM PREPARATION AND CHARACTERIZATION OF ULTRA-THIN LAYERS OF SIO2 ON ZRO2 AND TIO2 BY CHEMICAL VAPOR-DEPOSITION OF SI(OET)4

被引:33
作者
JIN, T [1 ]
OKUHARA, T [1 ]
WHITE, JM [1 ]
机构
[1] UNIV TEXAS,DEPT CHEM,AUSTIN,TX 78712
关键词
D O I
10.1039/c39870001248
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:1248 / 1249
页数:2
相关论文
共 13 条
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  • [12] Tanabe K, 1981, CATAL SCI TECHNOL, V2, P231
  • [13] 1986, CHEM ENG NEWS 0811, P22