KOHLER ILLUMINATION IN THE TEM - FUNDAMENTALS AND ADVANTAGES

被引:39
作者
BENNER, G
PROBST, W
机构
[1] Electron Optics Division, Oberkochen
来源
JOURNAL OF MICROSCOPY-OXFORD | 1994年 / 174卷
关键词
KOHLER ILLUMINATION; TEM ILLUMINATION SYSTEMS; SPOT SCAN ILLUMINATION; SELECTED-AREA DIFFRACTION; CONDENSER OBJECTIVE LENS; COHERENT ILLUMINATION;
D O I
10.1111/j.1365-2818.1994.tb03461.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
Kohler illumination is the most favourable design for the illumination path of an electron microscope with a condenser objective lens. The new illumination system of the EM 910 and EM 912 OMEGA allows both wide area (Kohler) illumination for TEM operation and spot illumination for analytical investigations. Compared to conventional systems and objective lenses with a condenser mini lens, this system offers many advantages. In addition to the homogeneous, highly coherent and parallel illumination of every point in the specimen, it offers advantages for selected area diffraction and spot scan mode. Combined with the electron optical selection of a condenser aperture, this illumination system provides the flexibility necessary to achieve optimum illumination for the specimen.
引用
收藏
页码:133 / 142
页数:10
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