ALKALI-INDUCED OXIDATION OF SILICON

被引:49
作者
MICHEL, EG
OELLIG, EM
ASENSIO, MC
MIRANDA, R
机构
关键词
D O I
10.1016/S0039-6028(87)80439-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
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页码:245 / 251
页数:7
相关论文
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