SPUTTERED INDIUM-TIN OXIDE SUBSTRATES FOR CDS-CDTE SOLAR-CELLS

被引：27

作者：

TOUSKOVA, J ^{[1
]}

KOVANDA, J ^{[1
]}

DOBIASOVA, L ^{[1
]}

PARIZEK, V ^{[1
]}

KIELAR, P ^{[1
]}

机构：

[1] CHARLES UNIV,INST PHYS,CR-12116 PRAGUE 2,CZECH REPUBLIC

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1995年 / 37卷 / 3-4期

关键词：

D O I：

10.1016/0927-0248(95)00029-1

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Simple d.c. sputtering was used for the deposition of ITO films on glass substrates. Their structural, electrical, optical, and chemical properties depend on the substrate temperature. A temperature slightly above 400 degrees C is optimal and leads to an increase of the grain size, mobility, carrier concentration, and conductivity of the layers. The lowest resistivity is 1.88 x 10(-4) Omega cm and relevant transmittivity is 83.3%. Moreover, these layers are noted for a good chemical stability, which enables us to use them as transparent conductive electrodes for the CdS-CdTe solar cells prepared by chemical and electrochemical methods. ITO films on unheated substrates do not attain the required properties not even after annealings in various atmospheres.

引用

页码：357 / 365

页数：9

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