STUDIES ON SURFACE PREPARATION

被引：5

作者：

FAUST, JW

机构：

[1] Materials Research Laboratory, Pennsylvania State University, University Park

来源：

SURFACE SCIENCE | 1969年 / 13卷 / 01期

关键词：

D O I：

10.1016/0039-6028(69)90236-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Surfaces upon which physical measurements or devices are to be made must be very carefully prepared. The general steps in surface preparation are a) cutting, b) lapping and polishing, and c) etching. Each of these topics is briefly reviewed to point out the important places where things could go wrong. In addition, the studies of the cleanness of the oxide layer and purity of chemicals used in the processes are discussed. © 1969.

引用

页码：60 / &

共 23 条

[1] ARCHER R, PRIVATE COMMUNICATIO
[2] LARGE-AREA JET ELECTROLYTIC POLISHING OF GE AND SI
BOOKER, GR
STICKLER, R
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (12) : 1167 - 1171
[3] EFFECT OF THE POLARITY OF THE III-V INTERMETALLIC COMPOUNDS ON ETCHING
FAUST, JW
SAGAR, A
[J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (02) : 331 - 333
[4] MOLTEN METAL ETCHES FOR THE ORIENTATION OF SEMICONDUCTORS BY OPTICAL TECHNIQUES
FAUST, JW
SAGAR, A
JOHN, HF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (09) : 824 - 828
[5] FAUST JW, 1959, METHODS EXPTL PHYSIC, V6, P147
[6] FAUST JW, 1959, ASTM246 TECHN PUBL, P66
[7] FAUST JW, 1964, ELECTROCHEM TECHNOL, V2, P339
[8] ETCHING BEHAVIOR OF THE (110) AND (100) SURFACES OF INSB
GATOS, HC
LAVINE, MC
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (05) : 433 - 436
[9] CHARACTERISTICS OF THE (111) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS
GATOS, HC
LAVINE, MC
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (05) : 427 - 433
[10] GATOS HC, 1960, SURFACE CHEMISTRY ED, P82

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