TIME-DEPENDENT RF SWARM TRANSPORT BY DIRECT NUMERICAL PROCEDURE OF THE BOLTZMANN-EQUATION

被引：44

作者：

MAEDA, K

MAKABE, T

机构：

[1] Department of Electrical Engineering, Keio University

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

RF SWARM TRANSPORT; ANISOTROPY; NONLINEAR TIME RESPONSE; RF DISCHARGE; BOLTZMANN EQUATION;

D O I：

10.1143/JJAP.33.4173

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in de fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.

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收藏

页码：4173 / 4176

页数：4

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