THE TIME BEHAVIOR OF ELECTRON-TRANSPORT IN RF FIELDS IN GASES

被引:44
作者
MAKABE, T
GOTO, N
机构
关键词
D O I
10.1088/0022-3727/21/6/005
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:887 / 895
页数:9
相关论文
共 21 条
[1]  
Brown S. C., 1966, INTRO ELECT DISCHARG
[2]   TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J].
CHATHAM, H ;
HILS, D ;
ROBERTSON, R ;
GALLAGHER, A .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) :1770-1777
[3]   EVIDENCE FOR A TIME-DEPENDENT EXCITATION PROCESS IN SILANE RADIO-FREQUENCY GLOW-DISCHARGES [J].
DEROSNY, G ;
MOSBURG, ER ;
ABELSON, JR ;
DEVAUD, G ;
KERNS, RC .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2272-2275
[4]   ELECTRON-ENERGY DISTRIBUTIONS AND EXCITATION RATES IN HIGH-FREQUENCY ARGON DISCHARGES [J].
FERREIRA, CM ;
LOUREIRO, J .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (12) :2471-2483
[5]   TIME-DEPENDENT EXCITATION IN HIGH-FREQUENCY AND LOW-FREQUENCY CHLORINE PLASMAS [J].
FLAMM, DL ;
DONNELLY, VM .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (04) :1052-1062
[6]  
Gear CW., 1971, NUMERICAL INITIAL VA
[7]   TIME-RESOLVED OPTICAL DIAGNOSTICS OF RADIO-FREQUENCY PLASMAS [J].
GOTTSCHO, RA ;
MANDICH, ML .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :617-624
[8]   ION DYNAMICS OF RF PLASMAS AND PLASMA SHEATHS - A TIME-RESOLVED SPECTROSCOPIC STUDY [J].
GOTTSCHO, RA ;
BURTON, RH ;
FLAMM, DL ;
DONNELLY, VM ;
DAVIS, GP .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (07) :2707-2714
[9]  
Hayashi M., 1987, SWARM STUDIES INELAS, P167
[10]   ENERGY DISTRIBUTION OF ELECTRONS IN HIGH FREQUENCY GAS DISCHARGES [J].
HOLSTEIN, T .
PHYSICAL REVIEW, 1946, 70 (5-6) :367-384