TIME-DEPENDENT EXCITATION IN HIGH-FREQUENCY AND LOW-FREQUENCY CHLORINE PLASMAS

被引：63

作者：

FLAMM, DL

DONNELLY, VM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 04期

关键词：

D O I：

10.1063/1.336541

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1052 / 1062

页数：11

共 38 条

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