EVIDENCE FOR A TIME-DEPENDENT EXCITATION PROCESS IN SILANE RADIO-FREQUENCY GLOW-DISCHARGES

被引：62

作者：

DEROSNY, G ^{[1
]}

MOSBURG, ER ^{[1
]}

ABELSON, JR ^{[1
]}

DEVAUD, G ^{[1
]}

KERNS, RC ^{[1
]}

机构：

[1] SOLAR ENERGY RES INST,GOLDEN,CO 80401

来源：

关键词：

D O I：

10.1063/1.332381

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2272 / 2275

页数：4

共 13 条

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[J]. SOLAR CELLS, 1980, 2 (04): : 385 - 400
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[8] MOSBURG ER, 1981, 160TH M EL SOC DENV
[9] EMISSION-SPECTROSCOPY OF GLOW-DISCHARGE AND SPUTTERING PLASMAS USED IN AMORPHOUS SI-H FILM DEPOSITION
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (06): : 1332 - 1335
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