ORIGIN OF EMITTING SPECIES IN THE PLASMA DEPOSITION OF A-SI-H ALLOYS

被引：105

作者：

KAMPAS, FJ

GRIFFITH, RW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 03期

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D O I：

10.1063/1.329752

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1285 / 1288

页数：4

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