ORIGIN OF EMITTING SPECIES IN THE PLASMA DEPOSITION OF A-SI-H ALLOYS

[11] PHOTOELECTRON SPECTRA OF METHANE, SILANE, GERMANE, METHYL FLUORIDE, DIFLUOROMETHANE, AND TRIFLUOROMETHANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 53 (02) : 768 - +

[12] MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS [J]. THIN SOLID FILMS, 1980, 67 (02) : 309 - 320

[13] WEAKLIEM HA, 1980, 13TH AIAA FLUID PLAS

[14] 1971, NSRDSNBS37

[11] PHOTOELECTRON SPECTRA OF METHANE, SILANE, GERMANE, METHYL FLUORIDE, DIFLUOROMETHANE, AND TRIFLUOROMETHANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 53 (02) : 768 - +

[12] MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS [J]. THIN SOLID FILMS, 1980, 67 (02) : 309 - 320

[13] WEAKLIEM HA, 1980, 13TH AIAA FLUID PLAS

[14] 1971, NSRDSNBS37