OPTICAL-EMISSION SPECTROSCOPY - TOWARD THE IDENTIFICATION OF SPECIES IN THE PLASMA DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON ALLOYS

被引：49

作者：

KAMPAS, FJ

GRIFFITH, RW

机构：

来源：

SOLAR CELLS | 1980年 / 2卷 / 04期

关键词：

D O I：

10.1016/0379-6787(80)90014-9

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：385 / 400

页数：16

共 13 条

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