TOTAL-DOSE RADIATION EFFECTS ON SOL-GEL DERIVED PZT THIN-FILMS

被引:48
作者
LEE, SC [1 ]
TEOWEE, G [1 ]
SCHRIMPF, RD [1 ]
BIRNIE, DP [1 ]
UHLMANN, DR [1 ]
GALLOWAY, KF [1 ]
机构
[1] UNIV ARIZONA,DEPT MAT SCI & ENGN,TUCSON,AZ 85721
关键词
D O I
10.1109/23.211401
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Sol-Gel derived PZT thin films were irradiated to a total-dose of 1 Mrad(Si), or 86 krad(PZT), under open circuit bias. An asymmetric distortion in the hysteresis curves was observed. The distortion depends on the polarization state of the capacitor before irradiation. Post-irradiation electrical cycling makes the hysteresis loops symmetric initially, but results in fatigue effects. The leakage and switching current behavior after irradiation and post-rad cycling were studied using a static current vs. voltage measurement. Mechanisms of radiation-induced distortion and the fatigue effect during post-rad cycling are discussed.
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收藏
页码:2036 / 2043
页数:8
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