ION-BEAM LITHOGRAPHY

被引：42

作者：

BROWN, WL

VENKATESAN, T

WAGNER, A

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 191卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(81)90999-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：157 / 168

页数：12

共 35 条

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