HYPERTHERMAL NEUTRAL BEAM ETCHING

被引：77

作者：

GIAPIS, KP

MOORE, TA

MINTON, TK

机构：

[1] CALTECH,JET PROP LAB,PASADENA,CA 91109

[2] MONTANA STATE UNIV,CTR BIOFILM ENGN,BOZEMAN,MT 59717

[3] MONTANA STATE UNIV,DEPT CHEM & BIOCHEM,BOZEMAN,MT 59717

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579658

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：959 / 965

页数：7

共 42 条

[1] COLLISION-INDUCED DESORPTION OF PHYSISORBED CH4 FROM NI(111) - EXPERIMENTS AND SIMULATIONS [J].

BECKERLE, JD ;

JOHNSON, AD ;

CEYER, ST .

JOURNAL OF CHEMICAL PHYSICS, 1990, 93 (06) :4047-4065

[2] A HIGH-FLUX SOURCE OF ENERGETIC OXYGEN-ATOMS FOR MATERIAL DEGRADATION STUDIES [J].

CALEDONIA, GE ;

KRECH, RH ;

GREEN, BD .

AIAA JOURNAL, 1987, 25 (01) :59-63

[3]

CALEDONIA GE, 1990, Patent No. 4894511

[4] ENHANCED ETCHING OF SI(100) BY NEUTRAL CHLORINE BEAMS WITH KINETIC ENERGIES UP TO 6 EV [J].

CAMPOS, FX ;

WEAVER, GC ;

WALTMAN, CJ ;

LEONE, SR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (05) :2217-2221

[5]

CARTER G, 1968, ION BOMBARDMENT SOLI, P214

[6] NEW MECHANISMS FOR CHEMISTRY AT SURFACES [J].

CEYER, ST .

SCIENCE, 1990, 249 (4965) :133-139

[7]

COOK JM, 1991, SOLID STATE TECH APR, P119

[8] METASTABLE FRAGMENT PRODUCTION FOLLOWING ELECTRON-IMPACT EXCITATION OF SF6 [J].

CORR, JJ ;

KHAKOO, MA ;

MCCONKEY, JW .

JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1987, 20 (11) :2597-2606

[9]

CROSS JB, 1991, UNPUB 5TH P INT S MA

[10]

FLAMM DL, 1989, PLASMA ETCHING INTRO, pCH2

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