HYPERTHERMAL NEUTRAL BEAM ETCHING

被引:77
作者
GIAPIS, KP
MOORE, TA
MINTON, TK
机构
[1] CALTECH,JET PROP LAB,PASADENA,CA 91109
[2] MONTANA STATE UNIV,CTR BIOFILM ENGN,BOZEMAN,MT 59717
[3] MONTANA STATE UNIV,DEPT CHEM & BIOCHEM,BOZEMAN,MT 59717
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.579658
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:959 / 965
页数:7
相关论文
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