共 42 条
[31]
SATO M, 1990, 12TH P S DRY PROC TO, P123
[33]
SIMULATION OF PROFILE EVOLUTION IN SILICON REACTIVE ION ETCHING WITH REEMISSION AND SURFACE-DIFFUSION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (03)
:1091-1104
[38]
VUJNOVIC V, 1985, ASTRON ASTROPHYS, V151, P442
[39]
WEINBERG WH, 1991, DYNAMICS GAS SURFACE, pCH5
[40]
WINTERS HF, 1992, SURF SCI REP, V14, P161, DOI 10.1016/0167-5729(92)90009-Z