ELECTROLYTIC DEPOSITION OF THIN METAL-FILMS ON SEMICONDUCTOR SUBSTRATES

被引:81
作者
BINDRA, P [1 ]
GERISCHER, H [1 ]
KOLB, DM [1 ]
机构
[1] MAX PLANCK GESELL,FRITZ HABER INST,D-1000 BERLIN 33,FED REP GER
关键词
D O I
10.1149/1.2133471
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
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页码:1012 / 1018
页数:7
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