ANTIMONY ADSORPTION ON SILICON (111) ANALYZED IN REAL-TIME BY INSITU ELLIPSOMETRY

被引：38

作者：

ANDRIEU, S ^{[1
]}

DAVITAYA, FA ^{[1
]}

机构：

[1] ISA RIBER,F-92503 RUEIL MALMAISON,FRANCE

来源：

SURFACE SCIENCE | 1989年 / 219卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(89)90213-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：277 / 293

页数：17

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