DIFFRACTION EFFICIENCY OF CONTINUOUSLY ETCHED GRATINGS IN AS2S3 FILMS

被引:19
作者
CHANG, MS
HOU, TW
机构
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D O I
10.1016/0030-4018(78)90124-4
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:220 / 224
页数:5
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  • [1] Born M., 1975, PRINCIPLES OPTICS, P62
  • [2] COLLIER RL, 1971, OPTICAL HOLOGRAPHY, P107
  • [3] DUH K, 1973, B AM PHYS SOC, V18, P325
  • [4] JANAI M, 1976, PHOTOGR SCI ENG, V20, P234
  • [5] FE2O3 - INORGANIC ELECTRON RESIST MATERIAL
    KAMMLOTT, GW
    SINCLAIR, WR
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (07) : 929 - 932
  • [6] SURFACE RELIEF HOLOGRAMS IN EVAPORATED ARSENIC TRISULFIDE FILMS
    KENEMAN, SA
    [J]. THIN SOLID FILMS, 1974, 21 (02) : 281 - 285
  • [7] EFFICIENCY OF PHOTOCHROMIC GRATINGS
    KERMISCH, D
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) : 1202 - &
  • [8] Kogelnik H., 1967, Proceedings of the symposium on modern optics, P605
  • [9] NEW APPLICATION OF SE-GE GLASSES TO SILICON MICROFABRICATION TECHNOLOGY
    NAGAI, H
    YOSHIKAWA, A
    TOYOSHIMA, Y
    OCHI, O
    MIZUSHIMA, Y
    [J]. APPLIED PHYSICS LETTERS, 1976, 28 (03) : 145 - 147
  • [10] IRON-OXIDE - INORGANIC PHOTORESIST AND MASK MATERIAL
    SINCLAIR, WR
    ROUSSEAU, DL
    STANCAVI.JJ
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (07) : 925 - 928