SPUTTERING OF TRAPPED GAS FROM TUNGSTEN

被引:1
作者
ERENTS, K
NAVINSEK, B
CARTER, G
机构
来源
BRITISH JOURNAL OF APPLIED PHYSICS | 1967年 / 18卷 / 05期
关键词
D O I
10.1088/0508-3443/18/5/305
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:587 / &
相关论文
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