THE SELF-BIASED HETEROJUNCTION EFFECT OF FERROELECTRIC THIN-FILM ON SILICON SUBSTRATE

被引:49
作者
XU, YH
CHEN, CJ
XU, R
MACKENZIE, JD
机构
[1] Materials Science and Engineering Department, University of California, Los Angeles
关键词
D O I
10.1063/1.345420
中图分类号
O59 [应用物理学];
学科分类号
摘要
Several ferroelectric thin films with n-type or p-type conductivity, including undoped and doped lead zirconate titanate, barium titanate, strontium barium niobate, and potassium niobate, as well as lead barium niobate, were made on silicon single-crystal substrates by the sol-gel process. Self-biased heterojunction effects were observed in both p-ferroelectric thin film on n-silicon and n-ferroelectric thin film on p-silicon by the measurement of current-voltage characteristics. It has been observed that either p-n junction or n-p junction in the ferroelectric-semiconductor systems behave like a rectifying diode. However, the junction effect is weak in the p-ferroelectric thin film on p-silicon system. A physical model based on the consideration of energy-band theory has been constructed in explaining this effect. Possible applications of this effect are discussed.
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页码:2985 / 2991
页数:7
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