HYDROGEN ANNEAL OF E' CENTERS IN THERMAL SIO2 ON SI

被引：33

作者：

LI, Z

FONASH, SJ

POINDEXTER, EH

HARMATZ, M

RONG, F

BUCHWALD, WR

机构：

[1] PENN STATE UNIV,CTR ELECTR MAT & PROC,UNIVERSITY PK,PA 16802

[2] ELECTR TECHNOL & DEVICES LAB,FT MONMOUTH,NJ 07703

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1990年 / 126卷 / 1-2期

关键词：

D O I：

10.1016/0022-3093(90)91036-Q

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：173 / 176

页数：4

共 15 条

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