ANALYTIC INVERSION OF ELLIPSOMETRIC DATA FOR AN UNSUPPORTED NONABSORBING UNIFORM LAYER

被引：15

作者：

LEKNER, J

机构：

[1] Department of Physics, Victoria University of Wellington, Wellington

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1990年 / 7卷 / 10期

关键词：

D O I：

10.1364/JOSAA.7.001875

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The dielectric constant of a uniform unsupported or embedded layer is shown to satisfy a cubic equation with coefficients determined by the angle of incidence and the measured complex ellipsometric ratio p = rp/rs. Analytic inversion is thus possible. The consequence of measurement errors on the deduced dielectric constant and layer thickness is explored. © 1990 Optical Society of America.

引用

页码：1875 / 1877

页数：3

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