ADSORPTION OF NANOMETER-SIZED PALLADIUM PARTICLES ON SI(100) SURFACES

被引：17

作者：

BOONEKAMP, EP ^{[1
]}

KELLY, JJ ^{[1
]}

FOKKINK, LGJ ^{[1
]}

机构：

[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

LANGMUIR | 1994年 / 10卷 / 11期

关键词：

D O I：

10.1021/la00023a031

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

It is shown that polymer-stabilized Pd particles, adsorbed on Si, initiate the growth of electroless Ni. The influence of the polymer (poly(vinylpyrrolidone)) on the particle size and on the surface coverage is described. While Pd particles adsorb strongly on Si, almost no adsorption is observed on SiO2. Implications of this adsorption selectivity for the production of high-resolution metal patterns on Si are briefly discussed.

引用

页码：4089 / 4094

页数：6

共 19 条

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