THE INFLUENCE OF SOME GASES ON THE BEHAVIOR OF IMPEDANCE AND PIEZOELECTRIC HUMIDITY SENSORS

被引：3

作者：

EMMER, I ^{[1
]}

PRITCHARD, RG ^{[1
]}

机构：

[1] DE MONTFORT UNIV,SCH APPL SCI,DEPT APPL PHYS,LEICESTER LE1 9BH,ENGLAND

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 1994年 / 76卷 / 05期

关键词：

D O I：

10.1080/00207219408925985

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Extensive study of impedance and piezoelectric humidity sensors was undertaken in order to compare their behaviour in detail. Both types of sensor were provided with the same sensitive layer of hydrated alumina. Experimental results deal mostly with the sensitivity range, the temperature dependence and the long-term stability of the impedance and piezoelectric sensors. In addition, the cross-sensitivity of these sensors to some other industrial gases is evaluated. Morphological and structural features of the individual layers of both sensors studied by SEM and TEM are also presented.

引用

页码：829 / 835

页数：7