RANGE PARAMETERS STUDY OF PB AND AU IMPLANTED INTO SIC FILMS

被引：17

作者：

FICHTNER, PFP

BEHAR, M

FINK, D

GOPPELT, P

GRANDE, PL

机构：

[1] HAHN MEITNER INST KERNFORSCH BERLIN GMBH,W-1000 BERLIN 39,GERMANY

[2] UNIV FED RIO GRANDE SUL,ESCOLA ENGN,BR-90000 PORTO ALEGRE,RS,BRAZIL

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 64卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)95555-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

SiC films were implanted with Pb and Au ions in a 20-250 keV energy range. Range parameters were determined using the Rutherford backscattering technique. The experimental results are 20% higher than the theoretical predictions by Ziegler, Biersack and Littmark. Good agreement is only achieved when inelastic effects are included in the nuclear stopping regime.

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页码：668 / 671

页数：4

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