RAMAN-SCATTERING AND X-RAY PHOTOEMISSION SPECTROSCOPY STUDIES OF CARBON-FILMS SPUTTERED IN A TRIODE SYSTEM BY NE, AR, AND XE

被引：44

作者：

PARMIGIANI, F ^{[1
]}

KAY, E ^{[1
]}

SEKI, H ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 06期

关键词：

D O I：

10.1063/1.341566

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3031 / 3036

页数：6

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