FEED OPTIMIZATION FOR THE SLOTTED LINE ANTENNA FOR HIGH-DENSITY PLASMA PRODUCTION

被引：20

作者：

GANGULI, A

BASKARAN, R

PANDEY, HD

机构：

[1] Centre for Energy Studies, Indian Institute of Technology, Hauz Khas

[2] Centre for Energy Studies, Indian Institute of Technology, Hauz Khas

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1990年 / 18卷 / 01期

关键词：

27;

D O I：

10.1109/27.45516

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Investigations on the optimization of feed structures for exciting the slotted line antenna for high-density plasma production are presented. Each feed structure used (except the direct feed) excites a preferred component of the wave electric/magnetic field. It is seen that the efficacy of plasma production using the different feeds depends directly on the relative importance of the field components (which the feeds excite) for the slow wave mode of the antenna. The optimal feed is shown to be a dipole antenna, oriented so as to excite the radial component of the electric field within the slotted line structure. The plasma characterization results as a function of the input microwave power and the magnetic field in the antenna region are also presented and discussed. The ability of the antenna to maintain high-density plasmas well away from electron-cyclotron resonance is demonstrated. © 1990 IEEE

引用

页码：134 / 141

页数：8

共 27 条

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