ADHESION IMPROVEMENT IN DIAMOND FILMS BY MICROLITHOGRAPHIC PATTERNING

被引：9

作者：

DENATALE, JF

FLINTOFF, JF

HARKER, AB

机构：

[1] Rockwell International Science Center, Thousand Oaks, 91360, CA

来源：

JOURNAL OF MATERIALS SCIENCE | 1992年 / 27卷 / 02期

关键词：

D O I：

10.1007/BF00543949

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The use of microlithographic surface patterning has been investigated as a means of modifying the nucleation and adhesion of diamond films on non-compatible substrates. Significant improvements in film adhesion were achieved using this technique, to the point that interfacial integrity was maintained even at stress levels which induced subsurface fracture in the supporting substrate.

引用

页码：553 / 556

页数：4

共 6 条

[1] MICROSTRUCTURAL CONTROL OF DIAMOND THIN-FILMS BY MICROLITHOGRAPHIC PATTERNING [J].