SPIN-RESONANCE SPECTROSCOPY OF HYDROGENATED AMORPHOUS C-SI-GE ALLOYS

Spin-resonance spectroscopy has been used to investigate the unpaired spins in a-CSiGe : H alloys prepared by Sputter Assisted Plasmas Chemical Vapour Deposition at different deposition temperatures. Experiments were performed on as deposited and annealed samples. ESR resonances of Ge and Si dangling bonds and an apparently new resonance, which seems to be related to the overlapping of the defect states and the Urbach tail, have been observed on as deposited samples. The corresponding spin density has values higher than those obtained by other authors in binary tetrahedral alloys. A decrease of signals and spin density as the deposition temperature increases and a decrease in samples annealed at 250°C were observed. © 1990.