DETERMINATION OF THE FLUORINE CONTENT IN A-SI-H-F BY INFRARED-SPECTROSCOPY, ELECTRON-PROBE MICROANALYSIS, X-RAY PHOTOELECTRON-SPECTROSCOPY, AND SECONDARY ION MASS-SPECTROMETRY

被引：14

作者：

LANGFORD, AA

FLEET, ML

NELSON, AJ

ASHER, SE

GORAL, JP

MASON, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 12期

关键词：

D O I：

10.1063/1.343168

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5154 / 5160

页数：7

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