PRODUCTION OF HIGH-CURRENT METAL-ION BEAMS

被引:12
作者
HIRVONEN, JK
CAROSELLA, CA
HUBLER, GK
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 189卷 / 01期
关键词
D O I
10.1016/0029-554X(81)90130-0
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:103 / 106
页数:4
相关论文
共 5 条
  • [1] CAROSELLA CA, 1980, ION IMPLANTATION MET
  • [2] DEARNALEY G, 1973, ION IMPLANTATION, P383
  • [3] ION-IMPLANTATION IN TRIBOLOGY AND CORROSION SCIENCE
    HIRVONEN, JK
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05): : 1662 - 1668
  • [4] SIDENIUS G, 1961, ELECTROMAGNETIC SEPA, P234
  • [5] APPLICATIONS OF ION-IMPLANTATION FOR THE IMPROVEMENT OF LOCALIZED CORROSION-RESISTANCE OF M50 BEARING STEEL
    WANG, YF
    CLAYTON, CR
    HUBLER, GK
    LUCKE, WH
    HIRVONEN, JK
    [J]. THIN SOLID FILMS, 1979, 63 (01) : 11 - 18