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FORMATION OF GA1-XALX AS LAYERS ON THE SURFACE OF GAAS DURING CONTINUAL DISSOLUTION INTO GA-AL-AS SOLUTIONS
被引:28
作者:
SMALL, MB
GHEZ, R
POTEMSKI, RM
WOODALL, JM
机构:
[1] IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
关键词:
D O I:
10.1063/1.91096
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
When solid GaAs is placed in an undersaturated solution of Ga, Al, and As, it has been observed that a layer of the solid Ga1-xAlxAs forms on the surface. In the past the presence of this layer has been attributed to a process of regrowth following sufficient dissolution to saturate the solution. On the other hand, an analysis of the kinetics of the situation has suggested that dissolution should be continuous and that the surface layer is formed by solid diffusion. An experiment is reported here in which the solid is forced to dissolve continuously, and a layer of Ga1-xAlxAs of similar thickness to those reported by others has been found to be produced on the surface. Such a layer could not have been produced by regrowth. In order to be produced by solid diffusion, the diffusion coefficient of Al in GaAs must be anomalously high.
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页码:209 / 210
页数:2
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