ANALYTICAL SYSTEM FOR SECONDARY ION MASS-SPECTROMETRY IN ULTRA HIGH-VACUUM

被引:20
作者
HUBER, WK
SELHOFER, H
BENNINGH.A
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 01期
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D O I
10.1116/1.1316662
中图分类号
O59 [应用物理学];
学科分类号
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页码:482 / &
相关论文
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