CALCULATIONS ON THE PROPERTIES OF HELIUM IN SILICON

被引:18
作者
KAPLAN, DR [1 ]
WEIGEL, C [1 ]
CORBETT, JW [1 ]
机构
[1] SUNY ALBANY,INST STUDY DEFECTS SOLIDS,DEPT PHYS,ALBANY,NY 12222
来源
PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1979年 / 94卷 / 02期
关键词
D O I
10.1002/pssb.2220940204
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The electronic properties, lattice location, and diffusion coefficient of helium are investigated in silicon by extended Hückel theory calculations. The electrical properties are unchanged, the helium sits in the tetrahedral interstitial position, and the calculated diffusion coefficient is (1.28 ± 0.11) × 10−3 cm2s−1 exp (− 1.8 eV/kT). Copyright © 1979 WILEY‐VCH Verlag GmbH & Co. KGaA
引用
收藏
页码:359 / 366
页数:8
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