ACTIVATION OF HYDROGEN SENSITIVE PALLADIUM-OXIDE-SEMICONDUCTOR STRUCTURES STUDIED WITH SIMULTANEOUS ELLIPSOMETRIC AND CAPACITANCE MEASUREMENTS

被引:8
作者
JANSSON, R
ARWIN, H
ARMGARTH, M
LUNDSTROM, I
机构
关键词
D O I
10.1016/0169-4332(89)90972-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:44 / 54
页数:11
相关论文
共 18 条
[1]  
ARMGARTH M, 1983, LINKOPING STUDIES SC, V107
[2]   DETERMINATION OF OPTICAL-PROPERTIES OF THIN ORGANIC FILMS BY SPECTROELLIPSOMETRY [J].
ARWIN, H ;
ASPNES, DE .
THIN SOLID FILMS, 1986, 138 (02) :195-207
[3]  
Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[4]   HIGH PRECISION SCANNING ELLIPSOMETER [J].
ASPNES, DE ;
STUDNA, AA .
APPLIED OPTICS, 1975, 14 (01) :220-228
[5]  
Azzam R. M. A., 1977, ELLIPSOMETRY POLARIZ
[6]   A HYDROGEN SENSITIVE PD-MOS STRUCTURE WORKING OVER A WIDE PRESSURE RANGE [J].
DANNETUN, HM ;
PETERSSON, LG ;
SODERBERG, D ;
LUNDSTROM, I .
APPLIED SURFACE SCIENCE, 1984, 17 (03) :259-264
[7]   KINETICS OF HYDROGEN ABSORPTION BY PD(110) [J].
KAY, BD ;
PEDEN, CHF ;
GOODMAN, DW .
PHYSICAL REVIEW B, 1986, 34 (02) :817-821
[8]   SOLUBILITY OF H, D, AND T IN PD AT LOW CONCENTRATIONS [J].
LASSER, R ;
POWELL, GL .
PHYSICAL REVIEW B, 1986, 34 (02) :578-586
[9]   GAS SENSORS BASED ON CATALYTIC METAL-GATE FIELD-EFFECT DEVICES [J].
LUNDSTROM, I ;
ARMGARTH, M ;
SPETZ, A ;
WINQUIST, F .
SENSORS AND ACTUATORS, 1986, 10 (3-4) :399-421
[10]   HYDROGEN SENSITIVE MOS-STRUCTURES .2. CHARACTERIZATION [J].
LUNDSTROM, I ;
SODERBERG, D .
SENSORS AND ACTUATORS, 1981, 2 (02) :105-138