HIGH PRECISION SCANNING ELLIPSOMETER

被引：647

作者：

ASPNES, DE ^{[1
]}

STUDNA, AA ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

APPLIED OPTICS | 1975年 / 14卷 / 01期

关键词：

D O I：

10.1364/AO.14.000220

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：220 / 228

页数：9

相关论文

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[8] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
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