EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS

被引：120

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1974年 / 64卷 / 06期

关键词：

D O I：

10.1364/JOSA.64.000812

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：812 / 819

页数：8

共 26 条

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[2]

Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6

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ASPNES, DE .

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ASPNES, DE .

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AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[8] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1236-&

[9] ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (10) :1380-&

[10] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES [J].

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