UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES

被引：60

作者：

AZZAM, RMA

BASHARA, NM

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1971年 / 61卷 / 05期

关键词：

D O I：

10.1364/JOSA.61.000600

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：600 / &

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