GENERAL EQUATIONS OF SYMMETRICAL ELLIPSOMETER ARRANGEMENTS

被引：23

作者：

JOHNSON, JA

BASHARA, NM

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1970年 / 60卷 / 02期

关键词：

D O I：

10.1364/JOSA.60.000221

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：221 / &

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[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY
ARCHER, RJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &
[2] FORMULAS FOR USING WAVE PLATES IN ELLIPSOMETRY
HOLMES, DA
FEUCHT, DL
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (04) : 466 - +
[3] DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY
MULLER, RH
[J]. SURFACE SCIENCE, 1969, 16 : 14 - &
[4] ELLIPSOMETRY USING A RETARDATION PLATE AS COMPENSATOR
OLDHAM, WG
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (05) : 617 - &
[5] A THEORETICAL AND EXPERIMENTAL ANALYSIS OF ELLIPSOMETER
SMITH, PH
[J]. SURFACE SCIENCE, 1969, 16 : 34 - &