ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS

被引：37

作者：

AZZAM, RMA

BASHARA, NM

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1971年 / 61卷 / 10期

关键词：

D O I：

10.1364/JOSA.61.001380

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：1380 / &

相关论文

共 6 条

[1] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) : 600 - &
[2] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1118 - &
[3] EFFECTS OF POLARIZER ELLIPTICITY ON ELLIPSOMETRY MEASUREMENTS
HUNTER, WR
EATON, DH
SAH, CT
[J]. SURFACE SCIENCE, 1970, 20 (02) : 355 - &
[4] ANALYSES AND CORRECTIONS OF INSTRUMENTAL ERRORS IN ELLIPSOMETRY
MCCRACKIN, FL
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (01) : 57 - +
[5] SHURCLIFF WA, 1962, POLARIZED LIGHT, P165
[6] VANDEHULST HC, 1957, LIGHT SCATTERING SMA, P44