EFFECTS OF POLARIZER ELLIPTICITY ON ELLIPSOMETRY MEASUREMENTS

被引：19

作者：

HUNTER, WR

EATON, DH

SAH, CT

机构：

来源：

SURFACE SCIENCE | 1970年 / 20卷 / 02期

关键词：

D O I：

10.1016/0039-6028(70)90188-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

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页码：355 / &

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