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CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES

被引：19
作者：
AZZAM, RMA
BASHARA, NM
机构：
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1971年 / 61卷 / 08期
关键词：
D O I：
10.1364/JOSA.61.001118
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1118 / &
相关论文
共 6 条
[1]   UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&
[2]  
Ghezzo M., 1969, British Journal of Applied Physics (Journal of Physics D), V2, P1483
[3]   EFFECTS OF POLARIZER ELLIPTICITY ON ELLIPSOMETRY MEASUREMENTS [J].
HUNTER, WR ;
EATON, DH ;
SAH, CT .
SURFACE SCIENCE, 1970, 20 (02) :355-&
[4]   2 ALIGNMENT METHODS FOR POLARIZER AND ANALYZER IN AN ELLIPSOMETER [J].
LILJENVALL, HG ;
MATHEWSON, AG .
APPLIED OPTICS, 1970, 9 (06) :1489-+
[5]   MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].
MCCRACKIN, FL ;
PASSAGLIA, E ;
STROMBERG, RR ;
STEINBERG, HL .
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+
[6]  
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