OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS

被引：123

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1974年 / 64卷 / 05期

关键词：

ELLIPSOMETERS;

D O I：

10.1364/JOSA.64.000639

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：639 / 646

页数：8

相关论文

共 30 条

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