MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY

被引：42

作者：

ASPNES, DE

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1971年 / 61卷 / 08期

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D O I：

10.1364/JOSA.61.001077

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：1077 / &

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