ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE

被引：169

作者：

FENSTERMAKER, CA

MCCRACKIN, FL

机构：

[1] Institute for Materials Research, National Bureau of Standards, Washington

来源：

SURFACE SCIENCE | 1969年 / 16卷

关键词：

D O I：

10.1016/0039-6028(69)90007-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The roughness of a surface is generally neglected when the refractive index of a material is calculated from ellipsometer measurements. Errors produced by neglecting the roughness of the surface are evaluated for three models of the topography of the surface (square ridges, triangular ridges, and pyramids). A range of roughness from 0 to 500 Å and six substrate materials (glass, silicon, chrome, mercury, gold, and silver) are considered. Large errors in determination of indices, even for small values of roughness (50 Å), were found. © 1969.

引用

页码：85 / +

页数：1

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