MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY

[21] NYE JF, 1957, PHYSICAL PROPERTIES, P260

[22] ELLIPSOMETRY USING A RETARDATION PLATE AS COMPENSATOR [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (05) : 617 - &

[23] ERROR ANALYSIS OF ANGLE OF INCIDENCE MEASUREMENTS [J]. SURFACE SCIENCE, 1969, 16 : 104 - &

[24] Shurcliff W. A., 1962, POLARIZED LIGHT

[25] A THEORETICAL AND EXPERIMENTAL ANALYSIS OF ELLIPSOMETER [J]. SURFACE SCIENCE, 1969, 16 : 34 - &

[26] Szivessy G, 1934, ANN PHYS-BERLIN, V20, P703

[27] WINTERBOTTOM AB, 1937, J SCI INSTRUM, V14, P203

[28] YOLKEN T, 1967, J OPT SOC AM, V57, P283

[21] NYE JF, 1957, PHYSICAL PROPERTIES, P260

[22] ELLIPSOMETRY USING A RETARDATION PLATE AS COMPENSATOR [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (05) : 617 - &

[23] ERROR ANALYSIS OF ANGLE OF INCIDENCE MEASUREMENTS [J]. SURFACE SCIENCE, 1969, 16 : 104 - &

[24] Shurcliff W. A., 1962, POLARIZED LIGHT

[25] A THEORETICAL AND EXPERIMENTAL ANALYSIS OF ELLIPSOMETER [J]. SURFACE SCIENCE, 1969, 16 : 34 - &

[26] Szivessy G, 1934, ANN PHYS-BERLIN, V20, P703

[27] WINTERBOTTOM AB, 1937, J SCI INSTRUM, V14, P203

[28] YOLKEN T, 1967, J OPT SOC AM, V57, P283