ERROR ANALYSIS OF ANGLE OF INCIDENCE MEASUREMENTS

被引：29

作者：

SCHUELER, DG

机构：

[1] Sandia Laboratory, Albuquerque

来源：

SURFACE SCIENCE | 1969年 / 16卷

关键词：

D O I：

10.1016/0039-6028(69)90009-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Variation of the angle of incidence offers a simple experimental method of increasing the number of unknown optical parameters that can be determined from ellipsometric measurements on a complex reflecting structure. A general method of extracting unknown parameters from a series of experimental measurements is discussed. A numerical analysis of the experimental sensitivity of this method when applied to the simultaneous determination of the thickness and complex refractive index of a thin film on a gold substrate is presented. © 1969.

引用

页码：104 / &

共 7 条

[1] ELLIPSOMETER STUDY OF ANOMALOUS ABSORPTION IN VERY THIN DIELECTRIC FILMS ON EVAPORATED METALS [J].