IONIC CONDUCTIVITY DIELECTRIC CONSTANT AND OPTICAL PROPERTIES OF ANODIC OXIDE FILMS ON 2 TYPES OF SPUTTERED TANTALUM FILMS

被引：27

作者：

MILLS, D

YOUNG, L

ZOBEL, FGR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1966年 / 37卷 / 04期

关键词：

D O I：

10.1063/1.1708608

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1821 / &

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