ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS

被引：43

作者：

AZZAM, RMA ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,ENGN RES CTR,ELECT MAT LAB,LINCOLN,NB 68508

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1974年 / 64卷 / 11期

关键词：

D O I：

10.1364/JOSA.64.001459

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：1459 / 1469

页数：11

相关论文

共 34 条

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[2] Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6
[3] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY
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[4] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
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[5] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) : 812 - 819
[6] Azzam R. M. A., 1973, Applied Physics, V1, P203, DOI 10.1007/BF00884670
[7] Azzam R. M. A., 1973, Applied Physics, V2, P59, DOI 10.1007/BF00934174
[8] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY
AZZAM, RMA
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) : 700 - &
[9] ELLIPSOMETRIC MEASUREMENT OF POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM
AZZAM, RMA
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (03) : 336 - &
[10] GENERALIZED ELLIPSOMETRY FOR SURFACES WITH DIRECTIONAL PREFERENCE - APPLICATION TO DIFFRACTION GRATINGS
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